NanoSIMS 50

 SIMS microprobe for ultra fine feature analysis

The CAMECA NanoSIMS 50 is an ion microprobe, developed for trace element and isotopic analysis of ultra-fine features.

It has several unique new features:

• The ability to extend the SIMS analysis to extremely small areas or volumes (50 nm size in caesium, 150 nm in oxygen) whilst maintaining extremely high sensitivity at High Mass Resolution. This derives from the revolutionary coaxial optical design of the ion gun and secondary ion extraction, and from a new design of the magnetic sector mass analyzer.
• The capability to measure up to 5 (NS50) or 7 (NS50L) masses (ions) in parallel, ensuring perfect isotopic ratio from the same small volume, or perfect image superimposition.

This outstanding performance opens new fields to which SIMS can be applied:

• In geology and space science, the 50nm SIMS lateral resolution together with the ability to measure isotopes precisely means that interplanetary dust particles and meteorite grains can be measured. The vast majority of these particles are much less than a micron in size. The analysis and classification of their isotopic signature helps model star formation.

The NanoSIMS can now also work in multiple Faraday Cup configuration. In this mode, generally used with spot size of a few µm, one can improve the precision and external reproducibility of isotope ratio measurements down to the low sub-per mil level. This new capability enlarges the application field in terrestrial geology.

In material research and semi conductors, the 50nm SIMS lateral resolution together with the sensitivity improvements allow trace element (dopant) imaging and quantification at sub-micron scale, even in insulating materials (e.g. Yttrium-Aluminium garnet). The application field is very large: dopant imaging in optical fibres or MEMS, phase, segregation, diffusion and particle analysis in metallurgy, ceramics, rubber, polymers to cite a few.

In biology and pharmacology, the 50nm SIMS lateral resolution (the minimum detail observable) allows intra-cellular analysis of inorganic traces in vegetal or animal tissues. The NanoSIMS isotopic ratio capabilities allow comparison in exactly the same subcellular compartments, of images of the distribution and measurement of the accumulation of several molecules labelled with different stable isotopes (eg: 15N, 13C, 2H, 18O, 33S, 74Se, etc.). See example: study on mouse cochlea. MIMS (Multiple Isotope Mass Spectrometry) opens a world of labelling possibilities impossible with autoradiography, and offers a much higher sensitivity. As other examples, remains of drugs in bone, liver or hair can be easily imaged with unrivalled lateral resolution and sensitivity.

Wide Angle Tomographic Atom Probe

 LASER-Assisted 3D Atom Probe for Semiconductors and Materials

The CAMECA LA-WATAP instrument is the next generation of Tomographic (or 3D) Atom Probe, providing quantitative atomic scale 3D elemental mapping of chemical heterogeneities in materials.

The LA-WATAP offers the following advantages:

• New LASER-Assisted atom evaporation allowing the analysis of semiconductor materials, a strong reduction of tip ruptures, and high mass resolution.
• Larger area of analysis for a better statistics on composition measurements: analysis area up to 100 nm in diameter.
• Faster acquisition rate: ~15 min. needed for collecting 1E6 atoms.
• Better quantitative results with the new Advanced Delay Line Detector (ADLD) and its benchmark multi-hit performance.
• FIM (Field Ion Microscopy) capabilities with gas introduction system available for research works.

The new CAMECA Wide Angle instrument (WATAP) with a larger field of view.

Shown below is a comparison of the same metallic sample (NiCr15Al5 nickel based alloy) analyzed with the former CAMECA TAP (left side) and the new CAMECA WATAP instrument (right side). The advantage of the next generation is obvious: the larger analyzed volume gives better statistics for precipitate quantitative measurements: size, shape and composition.

Note that the acquisition time is the same in both cases revealing a dramatic increase in the data rate with the introduction of the new Advanced Delay Line Detector and associated electronics and software.

Data obtained with a conventional TAP. Field: 7nmx 7nm x 60nm. Total number of atoms detected: 150,000.	Data obtained with the CAMECA WATAP. Field: 40nm x 40nm x 200nm. Total number of atoms detected: 8,000,000.

The LA-WATAP has been developed in collaboration with and under a technology transfer agreement with the world leading Atom Probe laboratory GPM (Groupe de Physique des Matriaux) at Rouen University, France.