SEM/TEM

Tescan



VEGA Series Scanning Electron Microscopes

VEGA series scanning electron microscopes

The VEGA series is a family of high-quality, fully PC-controlled scanning electron microscopes designed for high vacuum or variable pressure operations.

The VEGA series is offering a comprehensive range of sophisticated features:

  • Excellent electron-optical qualities
  • Ingenious column design with no mechanical centring elements, allowing simple operation and easy maintenance
  • Quick and easy achievement of a clean working vacuum by means of a fully automatic turbomolecular-pumped vacuum system on high vacuum and variable vacuum models
  • Flicker-free imaging with super clarity and brilliance as a result of the high quality digital image acquisition and processing system
  • Fully automated set-up of the microscope and many other automated procedures
  • Sophisticated software  for microscope control and image capture, as well as image archiving, processing and analysis
  • Remote control of the microscope with the possibility of remote diagnostics, which can reduce service costs
  • Unique SE detectors for low vacuum operation (LVSTD)

 

 

Two types of the vacuum system are offered:

VEGA HiVac
Conventional model operating at a high vacuum of approximately 1x10-2 Pa.

VEGA UniVac
Variable pressure SEM (VPSEM), which combines the advantages of the high vacuum model with extended facility for low vacuum operation. In low vacuum mode, nonconductive specimens can be examined in their natural, uncoated state, using all working modes of the optical system at pressures up to 150 Pa and in resolution mode at pressures up to 500 Pa (operation at chamber pressures up to 2000 Pa is an available option).

The VEGA family includes 8 models of microscopes provided with various chambers selected according to the users´ requirements concerning chamber size, stage movements precision and/or operation comfort. Abundant control software is included as standard and provides one of the most valued assets of Vega microscopes.

The microscope control software may be extended by other optional software modules according to the users’ requirements. Also, a wide choice of supplementary accessories and detectors may be selected as options.

The unique four-lens Wide Field Optics™ allows the optical system to be used in various modes:

  • Resolution mode provides the highest resolution for the chosen working conditions
  • Depth mode provides an enhanced depth of focus
  • Field mode allows an extra large field of view
  • Fish-eye mode provides a macro view of the sample
  • Rocking-beam working mode for assessment of crystal orientation data of the specimen, acquiring of electron channelling pattern (ECP)

The optical system of the variable vacuum Tescan SEMs is designed to ensure the highest possible resolution, as well as quick and easy switching between the high and low vacuum operating modes.

Tescan SEMs can be delivered with different chambers and stages, as well as a comprehensive range of optional accessories. Tescan works closely with all the SEM accessory vendors to ensure compatibility and trouble-free integration.

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Tescan Generation 3 SEM

The third generation of TESCAN microscopes represents nearly 20 years of experience gained from the research, development and manufacturing of scanning electron microscopes and supplementary accessories for SEMs and other special products. Within  the current portfolio of TESCAN products there are the VEGA 3 scanning electron microscopes with tungsten and Lab6 filament options , MIRA 3 high resolution Schottky emitter scanning electron microscopes and the VELA and LYRA 3 focused ion beam scanning electron microscopes.

New, modern high-performance electronics allows faster acquiring and processing of high quality and high resolution images and thus decreasing time needed to obtain image. Unique TESCAN real time In-Flight Beam Tracing™ for the beam optimization is now available for both field emission and also thermal emission columns.


MIRA High Performance FE SEM

MIRA high performance FE SEM

TESCAN is proud to introduce the new MIRA family of high performance microscopes equipped with a Schottky Field Emission electron gun.

The most important features of the new microscope are:

  • High brightness Schottky emitter for high-resolution / high-current / low-noise imaging.
  • Unique three-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the Tescan proprietary Intermediate Lens for the beam aperture optimisation.
  • Real time In-Flight Beam Tracing™ for the performance and spot optimisation integrating the well established software Electron Optical Design.
  • Fast imaging rate.
  • High-throughput large-area automation, e.g. automated particle location and analyses.
  • Fully automated microscope set-up including electron optics set-up and alignment.
  • Sophisticated software for SEM control, image acquisition, archiving, processing and analysis.
  • Network operations and built-in remote access/diagnostics, all come as the Tescan standard.

At present Tescan offer four models of MIRA according to the chamber size and vacuum system type:

MIRA LMH - operating at high vacuum mode.

MIRA LMU - allowing variable pressure modes with extended facility for low vacuum operation.

MIRA XMH  - extra large chamber, operating at high vacuum mode.

MIRA XMU - extra large chamber, variable pressure operation.

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LYRA Series FIB SEM

TESCAN are pleased to introduce the LYRA family of microscopes equipped with a Focused Ion Beam and extra large chamber with variable pressure capability.

The main features of the LYRA are:

  • A unique four-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the Tescan proprietary Intermediate Lens for the beam aperture optimization
  • Fast imaging rate, using first class YAG detectors
  • Variable pressure mode for observation of nonconductive specimens in their natural uncoated state
  • Fully automated microscope set-up including electron optics set-up and alignment
  • Live stereoscopic imaging for accurate 3D navigation
  • Network operations and built-in remote access/diagnostics, all come as a Tescan standard
  • 5-axis fully motorized compucentric stage with extra wide range of movements

 FIB Specific Features:

  • Unique ion optic column differentially pumped, with 2 ion pumps, for ultra-low ion scattering effect
  • Motorized aperture changer with ultra-high reproducibility
  • Beam Blanker and Faraday cup included as a standard
  • Simultaneous SEM imaging with FIB etching or deposition
  • FIB control is fully integrated in the SEM software
  • Powerful toolbox for basic shape creation with programmable process parameters

GIS Option Features:

  • Ideal geometrical configuration with respect to SEM and FIB columns
  • 5 independent gas reservoirs with capillaries
  • 3-axis microstage with automatic nozzles positioning
  • Automated temperature control

Standard Gases for GIS*:

  • Tungsten metal deposition
  • Platinum metal deposition
  • Insulator (SiOx) deposition
  • Enhanced etching of diamond and PMMA (H2O)
  • Enhanced or selective etching of Si, SiO2, Si3N4, W (XeF2)

* Other gases upon request

The LYRA is also available with a Schottky Field Emission Gun see the Tescan Website for further details


VEGA II EasyProbe

The VEGA II EasyProbe is a compact SEM fully integrated with a selected energy dispersive X-ray microanalyser. Superior imaging quality, high level of automation, easy usage and quick, quantitative elemental results directly in the live image are characteristic features of this instrument.

The main features of the instrument are:

  • A unique four-lens Wide Field Optics™design offering the variety of working and displaying modes including unique live stereoscopic imaging.
  • The proprietary Intermediate Lens (IML) that works as an „Aperture Changer“ makes the exchange of the effective final aperture in an electromagnetic way.
  • The column construction, without any mechanical centering elements, allows fully automated column set-up and alignment.
  • Fast and easy obtaining of the clean chamber vacuum by a powerful turbomolecular and a rotary fore vacuum pump.
  • Fast imaging rate due to first class YAG-based detectors
  • Fully integrated EDS microanalyser for automatic quantitative elemental analysis
  • An original EasySEM software interface with One-Touch EDX toolbox
  • Multi-user environment localized in many languages.
  • Built-in image management and report creation
  • Network operations and built-in remote access/diagnostics
  • Software extension modules for measurement, image processing and analysis.

The Tescan VEGA II EasyProbe is available with either a HiVac or Univac vacuum system allowing both high and variable pressure vacuum operation


For product information or to discuss your Tescan scanning electron microscope system requirements, click here and tell us more about yourself or visit the Tescan Website

 


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